Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791177 | Placing table including heat exchange medium path and substrate processing apparatus thereof | Katsuyuki Koizumi, Shota EZAKI | 2023-10-17 |
| 11784066 | Stage and plasma processing apparatus | Shota EZAKI, Katsuyuki Koizumi | 2023-10-10 |
| 11623663 | Transport service method, vehicle platooning method, vehicle group navigation system, self-driving vehicle capable of platooning, and grouped vehicle guidance device | Megumi Kobayashi, Yasuto Hatafuku, Masahiro Samejima, Hideki Kubo, Motokazu Iwasaki +14 more | 2023-04-11 |
| 11550103 | Optical connection component | Mitsuhiro IWAYA, Masayoshi Tsukamoto | 2023-01-10 |