Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791177 | Placing table including heat exchange medium path and substrate processing apparatus thereof | Katsuyuki Koizumi, Masanori Takahashi | 2023-10-17 |
| 11784066 | Stage and plasma processing apparatus | Katsuyuki Koizumi, Masanori Takahashi | 2023-10-10 |