Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837480 | Temperature controlling apparatus, temperature controlling method, and placing table | Katsuyuki Koizumi | 2023-12-05 |
| 11735392 | Plasma processing apparatus | Daisuke Hayashi, Katsuyuki Koizumi | 2023-08-22 |