Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699576 | Filter device and plasma processing apparatus | — | 2023-07-11 |
| 11694881 | Stage and plasma processing apparatus | Hiroki Endo, Katsuyuki Koizumi | 2023-07-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699576 | Filter device and plasma processing apparatus | — | 2023-07-11 |
| 11694881 | Stage and plasma processing apparatus | Hiroki Endo, Katsuyuki Koizumi | 2023-07-04 |