Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756806 | Heater power feeding mechanism | Katsuyuki Koizumi | 2023-09-12 |
| 11756807 | Power feeding mechanism and method for controlling temperature of a stage | — | 2023-09-12 |
| 11743973 | Placing table and plasma processing apparatus | — | 2023-08-29 |
| 11705302 | Substrate support and plasma processing apparatus | — | 2023-07-18 |