Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835861 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Shang-Sheng Li | 2023-12-05 |
| 11835866 | Method and system of surface topography measurement for lithography | Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2023-12-05 |
| 11768484 | Semiconductor wafer cooling | Cheng-Kang Hu, Jui-Chun Peng, Hsu-Shui Liu | 2023-09-26 |
| 11756789 | Semiconductor manufacturing method and apparatus thereof | Wen-Chih Wang | 2023-09-12 |
| 11747729 | Semiconductor developer tool and methods of operation | Chen Yi Hsu | 2023-09-05 |
| 11543754 | Extractor piping on outermost sidewall of immersion hood apparatus | Wei-Chih Lin | 2023-01-03 |