Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835861 | Resist pump buffer tank and method of resist defect reduction | Shang-Sheng Li, Yung-Yao Lee | 2023-12-05 |
| 11769678 | Liquid storage for facility chemical supply system | Tzu-Yang Lin, Cheng-Han Wu, Chen-Yu Liu, Kuo-Shu Tseng, Shang-Sheng Li +1 more | 2023-09-26 |
| 11747729 | Semiconductor developer tool and methods of operation | Yung-Yao Lee | 2023-09-05 |