Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835861 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Yung-Yao Lee | 2023-12-05 |
| 11806743 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Yao-Hwan Kao, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2023-11-07 |
| 11769678 | Liquid storage for facility chemical supply system | Tzu-Yang Lin, Cheng-Han Wu, Chen-Yu Liu, Kuo-Shu Tseng, Chen Yi Hsu +1 more | 2023-09-26 |