Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822237 | Method of manufacturing a semiconductor device | Ming-Hui Weng, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Yen-Yu Chen +5 more | 2023-11-21 |
| 11769678 | Liquid storage for facility chemical supply system | Tzu-Yang Lin, Cheng-Han Wu, Kuo-Shu Tseng, Shang-Sheng Li, Chen Yi Hsu +1 more | 2023-09-26 |
| 11754923 | Resist dispensing system and method of use | Ya-Ching Chang, Ching-Yu Chang, Chin-Hsiang Lin | 2023-09-12 |
| 11708495 | Priming material for substrate coating | Ching-Yu Chang | 2023-07-25 |
| 11694896 | Photoresist developer and method of developing photoresist | Ming-Hui Weng, An-Ren Zi, Ching-Yu Chang | 2023-07-04 |
| 11681221 | EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands | An-Ren Zi, Ching-Yu Chang | 2023-06-20 |