Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769678 | Liquid storage for facility chemical supply system | Tzu-Yang Lin, Cheng-Han Wu, Chen-Yu Liu, Shang-Sheng Li, Chen Yi Hsu +1 more | 2023-09-26 |
| 11742227 | Wafer cleaning system and method | Yao-Yuan SHANG, You-Feng CHEN | 2023-08-29 |
| 11642682 | Pipe design for prevent drip | Channing CHAN, Chun-Chih Lin | 2023-05-09 |