Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835866 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835866 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen | 2023-12-05 |