Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822239 | Resist composition and patterning process | Jun Hatakeyama, Takayuki Fujiwara | 2023-11-21 |
| 11774853 | Resist composition and patterning process | Jun Hatakeyama, Masahiro Fukushima, Takayuki Fujiwara, Kazuhiro Katayama | 2023-10-03 |
| 11709872 | Computer-readable recording medium storing response processing program, response processing method, and information processing apparatus | Shinichi Kawakami | 2023-07-25 |
| 11693314 | Resist composition and patterning process | Teppei Adachi, Shinya Yamashita, Tomohiro Kobayashi, Kenichi Oikawa, Takayuki Fujiwara | 2023-07-04 |
| 11687000 | Sulfonium compound, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Kazuhiro Katayama, Yuki Kera | 2023-06-27 |
| 11635690 | Positive resist composition and patterning process | Jun Hatakeyama, Takayuki Fujiwara | 2023-04-25 |
| 11604411 | Resist composition and patterning process | Jun Hatakeyama, Takayuki Fujiwara | 2023-03-14 |
| 11579526 | Resist composition and patterning process | Ryosuke Taniguchi, Satoshi Watanabe, Naoya Inoue | 2023-02-14 |
| 11560355 | Onium salt, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Kazuhiro Katayama | 2023-01-24 |