Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762287 | Onium salt compound, chemically amplified resist composition and patterning process | Takayuki Fujiwara, Tomohiro Kobayashi, Masahiro Fukushima | 2023-09-19 |
| 11693314 | Resist composition and patterning process | Teppei Adachi, Shinya Yamashita, Masaki Ohashi, Tomohiro Kobayashi, Takayuki Fujiwara | 2023-07-04 |
| 11662663 | Substrate protective film-forming composition and pattern forming process | Tomohiro Kobayashi, Masayoshi Sagehashi, Teppei Adachi | 2023-05-30 |