Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662663 | Substrate protective film-forming composition and pattern forming process | Tomohiro Kobayashi, Kenichi Oikawa, Teppei Adachi | 2023-05-30 |
| 11579529 | Positive resist composition and patterning process | Yoshinori Matsui, Tatsushi Kaneko, Akihiro Seki, Satoshi Watanabe | 2023-02-14 |
| 11548844 | Monomer, polymer, negative resist composition, photomask blank, and resist pattern forming process | Daisuke Domon, Masaaki Kotake, Naoya Inoue, Keiichi Masunaga, Satoshi Watanabe | 2023-01-10 |