Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693314 | Resist composition and patterning process | Shinya Yamashita, Masaki Ohashi, Tomohiro Kobayashi, Kenichi Oikawa, Takayuki Fujiwara | 2023-07-04 |
| 11662663 | Substrate protective film-forming composition and pattern forming process | Tomohiro Kobayashi, Kenichi Oikawa, Masayoshi Sagehashi | 2023-05-30 |