Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774853 | Resist composition and patterning process | Jun Hatakeyama, Masaki Ohashi, Masahiro Fukushima, Takayuki Fujiwara | 2023-10-03 |
| 11687000 | Sulfonium compound, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Masaki Ohashi, Yuki Kera | 2023-06-27 |
| 11560355 | Onium salt, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Masaki Ohashi | 2023-01-24 |