Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687000 | Sulfonium compound, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Masaki Ohashi, Kazuhiro Katayama | 2023-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687000 | Sulfonium compound, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Masaki Ohashi, Kazuhiro Katayama | 2023-06-27 |