Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823927 | Wafer inspection apparatus and system including the same | Kyunghun Han, Ingi Kim, Sangwoo Bae, Jungchul Lee, Minhwan Seo +3 more | 2023-11-21 |
| 11823961 | Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system | Eunhee Jeang, BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Maksim Riabko +7 more | 2023-11-21 |
| 11778719 | Laser beam delivery apparatus for extreme ultra violet light source | Dohyung Kim, Seongchul Hong, Kyungsik Kang, Insung Kim, Motoshi Sakai +1 more | 2023-10-03 |