Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823961 | Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system | Eunhee Jeang, BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Anton Sergeevich MEDVEDEV +7 more | 2023-11-21 |
| 11789332 | Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennas | Alexander Sergeevich Shorokhov, Kirill Igorevich Okhlopkov, Alexandr Igorevich Musorin | 2023-10-17 |