Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823961 | Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system | BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Maksim Riabko, Anton Sergeevich MEDVEDEV +7 more | 2023-11-21 |
| 11715628 | Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same | Jeongil Mun, Kyeonghun Kim, Taekyoon PARK, Jongwoo Sun, Seeyub Yang +2 more | 2023-08-01 |