Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715628 | Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same | Kyeonghun Kim, Taekyoon PARK, Jongwoo Sun, Seeyub Yang, Yongseok Lee +2 more | 2023-08-01 |