Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828952 | Light source and extreme ultraviolet light source system using the same | Dohyung Kim, Kyungsik Kang, Kyungbin Park, Motoshi Sakai, Seungkoo Lee +1 more | 2023-11-28 |
| 11778719 | Laser beam delivery apparatus for extreme ultra violet light source | Dohyung Kim, Kyungsik Kang, Insung Kim, Motoshi Sakai, Seulgi LEE +1 more | 2023-10-03 |