Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828952 | Light source and extreme ultraviolet light source system using the same | Dohyung Kim, Seongchul Hong, Kyungsik Kang, Kyungbin Park, Motoshi Sakai +1 more | 2023-11-28 |
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Dong-Hyub Lee, Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim +4 more | 2023-06-13 |