Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim, Yozo Matsuda +4 more | 2023-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim, Yozo Matsuda +4 more | 2023-06-13 |