Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828952 | Light source and extreme ultraviolet light source system using the same | Dohyung Kim, Seongchul Hong, Kyungsik Kang, Motoshi Sakai, Seungkoo Lee +1 more | 2023-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828952 | Light source and extreme ultraviolet light source system using the same | Dohyung Kim, Seongchul Hong, Kyungsik Kang, Motoshi Sakai, Seungkoo Lee +1 more | 2023-11-28 |