Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815815 | Composition for forming silicon-containing resist underlayer film removable by wet process | Hiroyuki Wakayama, Wataru SHIBAYAMA, Masahisa Endo | 2023-11-14 |
| 11674051 | Stepped substrate coating composition containing compound having curable functional group | Hikaru TOKUNAGA, Takafumi Endo, Hiroto OGATA, Keisuke Hashimoto | 2023-06-13 |
| 11609499 | Silicon-containing coating agent for pattern reversal | Shuhei Shigaki, Hiroaki Yaguchi | 2023-03-21 |
| 11574652 | Recording device and recording method | Shin-ichi Ohkoshi, Marie YOSHIKIYO, Kenta Imoto, Kosuke Nakagawa, Asuka Namai +3 more | 2023-02-07 |
| 11561472 | Radiation sensitive composition | Kenji Takase, Satoshi Takeda, Wataru SHIBAYAMA | 2023-01-24 |