Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815815 | Composition for forming silicon-containing resist underlayer film removable by wet process | Makoto Nakajima, Wataru SHIBAYAMA, Masahisa Endo | 2023-11-14 |
| 11674053 | Composition for forming underlayer film of self-assembled film including aliphatic polycyclic structure | Takafumi Endo, Yasunobu Someya, Rikimaru Sakamoto | 2023-06-13 |