Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815815 | Composition for forming silicon-containing resist underlayer film removable by wet process | Hiroyuki Wakayama, Makoto Nakajima, Masahisa Endo | 2023-11-14 |
| 11561472 | Radiation sensitive composition | Makoto Nakajima, Kenji Takase, Satoshi Takeda | 2023-01-24 |