Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815815 | Composition for forming silicon-containing resist underlayer film removable by wet process | Hiroyuki Wakayama, Makoto Nakajima, Wataru SHIBAYAMA | 2023-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815815 | Composition for forming silicon-containing resist underlayer film removable by wet process | Hiroyuki Wakayama, Makoto Nakajima, Wataru SHIBAYAMA | 2023-11-14 |