Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768436 | Protective film forming composition having a diol structure | Yasunobu Someya, Takahiro Kishioka | 2023-09-26 |
| 11681223 | Photocurable composition and method for producing semiconductor device | Hikaru TOKUNAGA, Keisuke Hashimoto, Rikimaru Sakamoto | 2023-06-20 |
| 11674051 | Stepped substrate coating composition containing compound having curable functional group | Hikaru TOKUNAGA, Hiroto OGATA, Keisuke Hashimoto, Makoto Nakajima | 2023-06-13 |
| 11674053 | Composition for forming underlayer film of self-assembled film including aliphatic polycyclic structure | Yasunobu Someya, Hiroyuki Wakayama, Rikimaru Sakamoto | 2023-06-13 |
| 11675269 | Composition for forming resist overlayer film for EUV lithography | Rikimaru Sakamoto, Bangching Ho | 2023-06-13 |
| 11650505 | Resist underlayer film-forming composition containing novolac resin reacted with aromatic methylol compound | Hirokazu Nishimaki, Rikimaru Sakamoto, Keisuke Hashimoto | 2023-05-16 |