Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11609499 | Silicon-containing coating agent for pattern reversal | Shuhei Shigaki, Makoto Nakajima | 2023-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11609499 | Silicon-containing coating agent for pattern reversal | Shuhei Shigaki, Makoto Nakajima | 2023-03-21 |