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High density ferroelectric random access memory (FeRAM) devices and methods of fabrication |
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Rapid thermal annealing (RTA) methodologies for integration of perovskite-material based trench capacitors |
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Ferroelectric device film stacks with texturing layer which is part of a bottom electrode, and method of forming such |
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Ferroelectric device film stacks with texturing layer which is part of a bottom electrode and a barrier, and method of forming such |
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Ferroelectric device film stacks with texturing layer, and method of forming such |
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