Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732358 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota | 2023-08-22 |
| 11715667 | Thermal process chamber lid with backside pumping | Anqing Cui, Dien-Yeh Wu, Yixiong Yang, Bo Wang | 2023-08-01 |
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Srinivas Gandikota, Yixiong Yang, Yong Wu, Jianqiu GUO +2 more | 2023-05-09 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2023-04-11 |