Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11701749 | Monitoring of vibrations during chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Thomas H. Osterheld, Jeonghoon Oh | 2023-07-18 |
| 11660722 | Polishing system with capacitive shear sensor | Chih Chung Chou, Dominic J. Benvegnu | 2023-05-30 |
| 11651207 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2023-05-16 |
| 11577356 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2023-02-14 |