Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619594 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu +1 more | 2023-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619594 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu +1 more | 2023-04-04 |