Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +3 more | 2023-12-19 |
| 11810768 | Temperature and bias control of edge ring | Linying Cui, Rajinder Dhindsa | 2023-11-07 |
| 11798790 | Apparatus and methods for controlling ion energy distribution | Linying Cui | 2023-10-24 |
| 11791138 | Automatic electrostatic chuck bias compensation during plasma processing | Linying Cui, Leonid Dorf | 2023-10-17 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2023-10-03 |
| 11728124 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2023-08-15 |
| 11699572 | Feedback loop for controlling a pulsed voltage waveform | Leonid Dorf, Evgeny Kamenetskiy, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2023-07-11 |
| 11694876 | Apparatus and method for delivering a plurality of waveform signals during plasma processing | Katsumasa Kawasaki | 2023-07-04 |
| 11610759 | Gas splitting by time average injection into different zones by fast gas valves | — | 2023-03-21 |
| 11551916 | Sheath and temperature control of a process kit in a substrate processing chamber | Jaeyong Cho, Rajinder Dhindsa, Anwar Husain | 2023-01-10 |