Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan +5 more | 2023-12-19 |
| 11776822 | Wet cleaning of electrostatic chuck | Tuochuan Huang, Gang Peng, Vijay D. Parkhe, Shinnosuke Kawaguchi, David Benjaminson | 2023-10-03 |
| 11710647 | Hyperbaric clean method and apparatus for cleaning semiconductor chamber components | Richard W. Plavidal, Scott Osterman, Gang Peng, John Z. Smith | 2023-07-25 |
| 11661652 | Wet cleaning inside of gasline of semiconductor process equipment | Gang Peng, Halbert Chong, Marcus Pereira | 2023-05-30 |