Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832026 | Substrate imaging apparatus | Norihisa Koga, Yasuaki Noda | 2023-11-28 |
| 11823922 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Masato Hosaka, Kazuya Hisano | 2023-11-21 |
| 11791162 | Processing apparatus for forming a coating film on a substrate having a camera and a mirror member | Yasuaki Noda | 2023-10-17 |
| 11726438 | Treatment condition setting method, storage medium, and substrate treatment system | Takuya Mori, Akiko Kiyotomi, Hiroshi Tomita | 2023-08-15 |
| 11669955 | Substrate defect inspection method, storage medium, and substrate defect inspection apparatus | Shin-ichi Inoue, Kazuya Hisano, Akiko Kiyotomi | 2023-06-06 |
| 11609502 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Masato Hosaka, Kazuya Hisano | 2023-03-21 |