Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832026 | Substrate imaging apparatus | Tadashi Nishiyama, Yasuaki Noda | 2023-11-28 |
| 11733612 | Substrate processing apparatus and method of processing substrate | Kazuya Iwata | 2023-08-22 |