Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11845608 | Suspension type transport vehicle and storage system | Eiji Wada | 2023-12-19 |
| 11733612 | Substrate processing apparatus and method of processing substrate | Norihisa Koga | 2023-08-22 |