Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832026 | Substrate imaging apparatus | Norihisa Koga, Tadashi Nishiyama | 2023-11-28 |
| 11791162 | Processing apparatus for forming a coating film on a substrate having a camera and a mirror member | Tadashi Nishiyama | 2023-10-17 |
| 11555691 | Substrate inspection system, substrate inspection method and recording medium | Hiroshi Nakamura, Toyohisa Tsuruda | 2023-01-17 |