Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823922 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Masato Hosaka, Tadashi Nishiyama | 2023-11-21 |
| 11669955 | Substrate defect inspection method, storage medium, and substrate defect inspection apparatus | Shin-ichi Inoue, Akiko Kiyotomi, Tadashi Nishiyama | 2023-06-06 |
| 11609502 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Masato Hosaka, Tadashi Nishiyama | 2023-03-21 |