Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823922 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Tadashi Nishiyama, Kazuya Hisano | 2023-11-21 |
| 11636579 | Information processing method, information processing apparatus and computer-readable recording medium | Toyohisa Tsuruda | 2023-04-25 |
| 11609502 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Tadashi Nishiyama, Kazuya Hisano | 2023-03-21 |
| 11544864 | Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium | Toyohisa Tsuruda, Yusuke YODA | 2023-01-03 |