Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823922 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Masato Hosaka, Tadashi Nishiyama, Kazuya Hisano | 2023-11-21 |
| 11726438 | Treatment condition setting method, storage medium, and substrate treatment system | Takuya Mori, Tadashi Nishiyama, Hiroshi Tomita | 2023-08-15 |
| 11676844 | Coating film forming apparatus and adjustment method therefor | Masatoshi Kawakita | 2023-06-13 |
| 11669955 | Substrate defect inspection method, storage medium, and substrate defect inspection apparatus | Shin-ichi Inoue, Kazuya Hisano, Tadashi Nishiyama | 2023-06-06 |
| 11609502 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Masato Hosaka, Tadashi Nishiyama, Kazuya Hisano | 2023-03-21 |