Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11773492 | Substrate processing apparatus, substrate processing method, and storage medium | Shogo Inaba | 2023-10-03 |
| 11676844 | Coating film forming apparatus and adjustment method therefor | Akiko Kiyotomi | 2023-06-13 |