Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11773492 | Substrate processing apparatus, substrate processing method, and storage medium | Masatoshi Kawakita | 2023-10-03 |
| 11679976 | Structure forming method and device | — | 2023-06-20 |
| 11557495 | Coating film forming method | — | 2023-01-17 |