Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841393 | Cooling unit, objective lens module, semiconductor inspection device, and semiconductor inspection method | Hirotaka Nonaka, Hiroyuki Matsuura, Hirotoshi Terada | 2023-12-12 |
| 11714120 | Semiconductor inspection device | Yoshitaka Iwaki | 2023-08-01 |
| 11694324 | Inspection apparatus and inspection method | Kenichiro IKEMURA, Akihiro Otaka | 2023-07-04 |
| 11569192 | Method for producing structure, and structure | Yuji Eguchi, Kohei Seyama, Hiroshi Kikuchi, Takehito Shimatsu, Miyuki UOMOTO | 2023-01-31 |
| 11545462 | Mounting apparatus and mounting system | Toru Maeda | 2023-01-03 |