Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841393 | Cooling unit, objective lens module, semiconductor inspection device, and semiconductor inspection method | Tomonori Nakamura, Hirotaka Nonaka, Hirotoshi Terada | 2023-12-12 |
| 11814764 | Nonwoven fabric for curtain and method for manufacture thereof | Shinobu Mizogami, Ryoichi Hane | 2023-11-14 |
| 11692269 | Plasma processing apparatus | Kiyotaka Ishibashi | 2023-07-04 |
| 11688585 | Plasma processing apparatus and plasma processing method | — | 2023-06-27 |