Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841393 | Cooling unit, objective lens module, semiconductor inspection device, and semiconductor inspection method | Tomonori Nakamura, Hiroyuki Matsuura, Hirotoshi Terada | 2023-12-12 |