Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11648638 | Substrate polishing apparatus and polishing liquid discharge method in substrate polishing apparatus | Kenichi Kobayashi | 2023-05-16 |
| 11618123 | Polishing method and polishing apparatus | Yu Ishii, Atsushi Yoshida | 2023-04-04 |
| 11607769 | Polishing apparatus of substrate | Hiroshi Sobukawa, Masahiro Hatakeyama | 2023-03-21 |
| 11597051 | Method for polishing substrate including functional chip | Hiroshi Sobukawa, Masahiro Hatakeyama | 2023-03-07 |
| 11548113 | Method and apparatus for polishing a substrate | Makoto Fukushima, Shingo Togashi, Tomoshi Inoue | 2023-01-10 |